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Electron diffraction study of defects at a semiconductor heterostructure interface

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Abstract

Interface dislocation periodicity at a Ge/Si interface is studied using electron diffraction. Relaxation effects due to these defects, normal to the interface, are measured.

Original languageEnglish
Pages (from-to)287-288
Number of pages2
JournalApplied Physics Letters
Volume58
Issue number3
DOIs
StatePublished - 1991

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