Abstract
The deposition of Zn 1-xCd xO thin films on (0001) sapphire substrates by pulsed-laser deposition was discussed. Structural and optical properties of Zn 1-xCd xO films were found to be correlated with to the processing conditions. It was found that the composition of the films varied nonomonotonically as a function of deposition temperature due to the difference of vapor pressure between Cd and Zn species. Analysis shows that the change of the optical properties is attributed to the change of the stoichiometry of Zn 1-xCd xO.
| Original language | English |
|---|---|
| Pages (from-to) | 218-220 |
| Number of pages | 3 |
| Journal | Applied Physics Letters |
| Volume | 85 |
| Issue number | 2 |
| DOIs | |
| State | Published - Jul 12 2004 |
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