Abstract
Detailed studies were conducted on YBa2Cu3O7-x thin films with multilayer Al/Cr/Yb metals as ohmic contact electrodes. Ytterbium not only provided an excellent ohmic contact to YBa2Cu3O7-x thin films, but also improved the zero resistance temperature after thermal treatment of the contacts. Superconducting thin films with zero resistance temperature of around 90 K with extremely sharp resistivity transitions, contact current density greater than 1.3 x 103A/cm2, and specific contact resistivity as low as 10-9 ohm · cm2 at 77 K were achieved on yttrium stabilized ZrO2 substrates. This occurred after contact deposition and thermal treatment at 450° C in pure oxygen for 20 min.
| Original language | English |
|---|---|
| Pages (from-to) | 443-447 |
| Number of pages | 5 |
| Journal | Journal of Electronic Materials |
| Volume | 19 |
| Issue number | 5 |
| DOIs | |
| State | Published - May 1990 |
Keywords
- ohmic contact
- Superconductor
- thin film
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