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Effect of thermal treatment on the properties of YBa2Cu3O7-x thin films with multilayer Al/Cr/Yb metals as ohmic contact electrodes

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Abstract

Detailed studies were conducted on YBa2Cu3O7-x thin films with multilayer Al/Cr/Yb metals as ohmic contact electrodes. Ytterbium not only provided an excellent ohmic contact to YBa2Cu3O7-x thin films, but also improved the zero resistance temperature after thermal treatment of the contacts. Superconducting thin films with zero resistance temperature of around 90 K with extremely sharp resistivity transitions, contact current density greater than 1.3 x 103A/cm2, and specific contact resistivity as low as 10-9 ohm · cm2 at 77 K were achieved on yttrium stabilized ZrO2 substrates. This occurred after contact deposition and thermal treatment at 450° C in pure oxygen for 20 min.

Original languageEnglish
Pages (from-to)443-447
Number of pages5
JournalJournal of Electronic Materials
Volume19
Issue number5
DOIs
StatePublished - May 1990

Keywords

  • ohmic contact
  • Superconductor
  • thin film

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