Detection of pH variation using modified microcantilever sensors

Hai Feng Ji; K. M. Hansen; Z. Hu; T. Thundat

doi:10.1016/S0925-4005(00)00678-X

Detection of pH variation using modified microcantilever sensors

Hai Feng Ji
, K. M. Hansen
, Z. Hu
, T. Thundat

Department of Chemical and Biological Engineering

Oak Ridge National Laboratory

Research output: Contribution to journal › Article › peer-review

87 Scopus citations

Abstract

A micromechanical technique for measuring solution pH using modified silicon (SiO₂) and silicon nitride (Si₃N₄) microcantilevers is described. As the modified surface of the cantilever accumulates charge proportional to the pH of the surrounding liquid, the cantilever undergoes bending due to the differential surface stress. Results are presented for chemically modified (4-aminobutyltriethoxysilane, 11-mercaptoundecanoic acid) and metal-modified (Au/Al) surfaces over a pH range 2-12. Aminosilane-modified SiO₂/Au cantilevers performed robustly over pH range 2-8 (49 nm deflection/pH unit), while Si₃N₄/Au cantilevers performed well at pH 2-6 and 8-12 (30 nm deflection/pH unit). The influences of other ions on cantilever bending were found to be negligible below 10^-2 M concentration.

Original language	English
Pages (from-to)	233-238
Number of pages	6
Journal	Sensors and Actuators, B: Chemical
Volume	72
Issue number	3
DOIs	https://doi.org/10.1016/S0925-4005(00)00678-X
State	Published - Feb 10 2001

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@article{16a66bb3a5244ae0984e717d1cac8202,

title = "Detection of pH variation using modified microcantilever sensors",

abstract = "A micromechanical technique for measuring solution pH using modified silicon (SiO2) and silicon nitride (Si3N4) microcantilevers is described. As the modified surface of the cantilever accumulates charge proportional to the pH of the surrounding liquid, the cantilever undergoes bending due to the differential surface stress. Results are presented for chemically modified (4-aminobutyltriethoxysilane, 11-mercaptoundecanoic acid) and metal-modified (Au/Al) surfaces over a pH range 2-12. Aminosilane-modified SiO2/Au cantilevers performed robustly over pH range 2-8 (49 nm deflection/pH unit), while Si3N4/Au cantilevers performed well at pH 2-6 and 8-12 (30 nm deflection/pH unit). The influences of other ions on cantilever bending were found to be negligible below 10-2 M concentration.",

author = "Ji, \{Hai Feng\} and Hansen, \{K. M.\} and Z. Hu and T. Thundat",

year = "2001",

month = feb,

day = "10",

doi = "10.1016/S0925-4005(00)00678-X",

language = "English",

volume = "72",

pages = "233--238",

journal = "Sensors and Actuators, B: Chemical",

issn = "0925-4005",

publisher = "Elsevier B.V.",

number = "3",

}

TY - JOUR

T1 - Detection of pH variation using modified microcantilever sensors

AU - Ji, Hai Feng

AU - Hansen, K. M.

AU - Hu, Z.

AU - Thundat, T.

PY - 2001/2/10

Y1 - 2001/2/10

N2 - A micromechanical technique for measuring solution pH using modified silicon (SiO2) and silicon nitride (Si3N4) microcantilevers is described. As the modified surface of the cantilever accumulates charge proportional to the pH of the surrounding liquid, the cantilever undergoes bending due to the differential surface stress. Results are presented for chemically modified (4-aminobutyltriethoxysilane, 11-mercaptoundecanoic acid) and metal-modified (Au/Al) surfaces over a pH range 2-12. Aminosilane-modified SiO2/Au cantilevers performed robustly over pH range 2-8 (49 nm deflection/pH unit), while Si3N4/Au cantilevers performed well at pH 2-6 and 8-12 (30 nm deflection/pH unit). The influences of other ions on cantilever bending were found to be negligible below 10-2 M concentration.

AB - A micromechanical technique for measuring solution pH using modified silicon (SiO2) and silicon nitride (Si3N4) microcantilevers is described. As the modified surface of the cantilever accumulates charge proportional to the pH of the surrounding liquid, the cantilever undergoes bending due to the differential surface stress. Results are presented for chemically modified (4-aminobutyltriethoxysilane, 11-mercaptoundecanoic acid) and metal-modified (Au/Al) surfaces over a pH range 2-12. Aminosilane-modified SiO2/Au cantilevers performed robustly over pH range 2-8 (49 nm deflection/pH unit), while Si3N4/Au cantilevers performed well at pH 2-6 and 8-12 (30 nm deflection/pH unit). The influences of other ions on cantilever bending were found to be negligible below 10-2 M concentration.

UR - https://www.scopus.com/pages/publications/0035253067

U2 - 10.1016/S0925-4005(00)00678-X

DO - 10.1016/S0925-4005(00)00678-X

M3 - Article

AN - SCOPUS:0035253067

SN - 0925-4005

VL - 72

SP - 233

EP - 238

JO - Sensors and Actuators, B: Chemical

JF - Sensors and Actuators, B: Chemical

IS - 3

ER -

Detection of pH variation using modified microcantilever sensors

Abstract

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