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Design and testing of single and double sided cantilevers for chemical sensing

  • Georgia Institute of Technology
  • Swiss Federal Institute of Technology Zurich
  • Oak Ridge National Laboratory

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

5 Scopus citations

Abstract

Two approaches to surface stress-based chemical sensing with piezoresistive microcantilevers are compared. Microcantilever-based chemical sensing is usually performed by functionalizing a single surface of the cantilever (single-sided surface stress- SSS). Sensitive measurements can be made by functionalization of both surfaces of the cantilever (double-sided surface stress- DSS). Design issues related to the sensitivity of these measurement principles are discussed. Also, a low noise method of measuring cantilever resistance is used for evaluation of surface stress response.

Original languageEnglish
Title of host publicationThe 6th IEEE Conference on SENSORS, IEEE SENSORS 2007
Pages1432-1435
Number of pages4
DOIs
StatePublished - 2007
Event6th IEEE Conference on SENSORS, IEEE SENSORS 2007 - Atlanta, GA, United States
Duration: Oct 28 2007Oct 31 2007

Publication series

NameProceedings of IEEE Sensors

Conference

Conference6th IEEE Conference on SENSORS, IEEE SENSORS 2007
Country/TerritoryUnited States
CityAtlanta, GA
Period10/28/0710/31/07

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