Control of abnormal grain inclusions in the nanocrystalline diamond film deposited by hot filament CVD

H. Li; Hak Joo Lee; Jong Keuk Park; Young Joon Baik; Gyu Weon Hwang; Jeung hyun Jeong; Wook Seong Lee

doi:10.1016/j.diamond.2009.08.009

Control of abnormal grain inclusions in the nanocrystalline diamond film deposited by hot filament CVD

H. Li
, Hak Joo Lee
, Jong Keuk Park
, Young Joon Baik
, Gyu Weon Hwang
, Jeung hyun Jeong
, Wook Seong Lee

Department of Electrical Engineering

Korea Institute of Science and Technology

Research output: Contribution to journal › Article › peer-review

22 Scopus citations

Abstract

Formation of abnormal grain inclusions in nanocrystalline diamond films deposited by hot filament CVD (HFCVD) was investigated. The phenomenon was attributed to two different origins: an intrinsic and an extrinsic one. The inclusions due to the intrinsic origin could be either avoided or weakened by controlling chamber pressure, CH₄/N₂ concentrations in H₂, and by positive substrate bias. The extrinsic origin for the abnormal grains was found to be the contamination from the alumina insulation tubes for the thermocouple placed near the substrate, which were degraded by the extended exposure to the high temperature and strongly reducing atmosphere.

Original language	English
Pages (from-to)	1369-1374
Number of pages	6
Journal	Diamond and Related Materials
Volume	18
Issue number	11
DOIs	https://doi.org/10.1016/j.diamond.2009.08.009
State	Published - Nov 2009

Keywords

Bias growth
Hot filament CVD
Nanocrystalline diamond film

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10.1016/j.diamond.2009.08.009

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title = "Control of abnormal grain inclusions in the nanocrystalline diamond film deposited by hot filament CVD",

abstract = "Formation of abnormal grain inclusions in nanocrystalline diamond films deposited by hot filament CVD (HFCVD) was investigated. The phenomenon was attributed to two different origins: an intrinsic and an extrinsic one. The inclusions due to the intrinsic origin could be either avoided or weakened by controlling chamber pressure, CH4/N2 concentrations in H2, and by positive substrate bias. The extrinsic origin for the abnormal grains was found to be the contamination from the alumina insulation tubes for the thermocouple placed near the substrate, which were degraded by the extended exposure to the high temperature and strongly reducing atmosphere.",

keywords = "Bias growth, Hot filament CVD, Nanocrystalline diamond film",

author = "H. Li and Lee, \{Hak Joo\} and Park, \{Jong Keuk\} and Baik, \{Young Joon\} and Hwang, \{Gyu Weon\} and Jeong, \{Jeung hyun\} and Lee, \{Wook Seong\}",

year = "2009",

month = nov,

doi = "10.1016/j.diamond.2009.08.009",

language = "English",

volume = "18",

pages = "1369--1374",

journal = "Diamond and Related Materials",

issn = "0925-9635",

publisher = "Elsevier B.V.",

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TY - JOUR

T1 - Control of abnormal grain inclusions in the nanocrystalline diamond film deposited by hot filament CVD

AU - Li, H.

AU - Lee, Hak Joo

AU - Park, Jong Keuk

AU - Baik, Young Joon

AU - Hwang, Gyu Weon

AU - Jeong, Jeung hyun

AU - Lee, Wook Seong

PY - 2009/11

Y1 - 2009/11

N2 - Formation of abnormal grain inclusions in nanocrystalline diamond films deposited by hot filament CVD (HFCVD) was investigated. The phenomenon was attributed to two different origins: an intrinsic and an extrinsic one. The inclusions due to the intrinsic origin could be either avoided or weakened by controlling chamber pressure, CH4/N2 concentrations in H2, and by positive substrate bias. The extrinsic origin for the abnormal grains was found to be the contamination from the alumina insulation tubes for the thermocouple placed near the substrate, which were degraded by the extended exposure to the high temperature and strongly reducing atmosphere.

AB - Formation of abnormal grain inclusions in nanocrystalline diamond films deposited by hot filament CVD (HFCVD) was investigated. The phenomenon was attributed to two different origins: an intrinsic and an extrinsic one. The inclusions due to the intrinsic origin could be either avoided or weakened by controlling chamber pressure, CH4/N2 concentrations in H2, and by positive substrate bias. The extrinsic origin for the abnormal grains was found to be the contamination from the alumina insulation tubes for the thermocouple placed near the substrate, which were degraded by the extended exposure to the high temperature and strongly reducing atmosphere.

KW - Bias growth

KW - Hot filament CVD

KW - Nanocrystalline diamond film

UR - https://www.scopus.com/pages/publications/71749102386

U2 - 10.1016/j.diamond.2009.08.009

DO - 10.1016/j.diamond.2009.08.009

M3 - Article

AN - SCOPUS:71749102386

SN - 0925-9635

VL - 18

SP - 1369

EP - 1374

JO - Diamond and Related Materials

JF - Diamond and Related Materials

IS - 11

ER -

Control of abnormal grain inclusions in the nanocrystalline diamond film deposited by hot filament CVD

Abstract

Keywords

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