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Circuit-level reliability simulator for front-end-of-line and middle-of-line time-dependent dielectric breakdown in FinFET technology

  • Kexin Yang
  • , Taizhi Liu
  • , Rui Zhang
  • , Linda Milor
  • Georgia Institute of Technology

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

8 Scopus citations

Abstract

This paper presents a lifetime simulator for both Front-End-of-Line (FEOL) time dependent dielectric breakdown (TDDB) and the newly emerging Middle-of-Line (MOL) time dependent dielectric breakdown for FinFET technology. A lifetime assessment flow for digital circuits and microprocessors is proposed for the target wearout mechanisms, and its associated vulnerable feature extraction algorithms are discussed in detail. Our simulator incorporates the detailed electrical stress, temperature, linewidth of each standard cell within the digital circuit and microprocessor. Also, FEOL TDDB and MOL TDDB lifetimes are combined in the calculation of TDDB lifetime. Circuit designers can use the resulting lifetime information to guide and improve their circuits to make them more robust and reliable.

Original languageEnglish
Title of host publicationProceedings - 2018 IEEE 36th VLSI Test Symposium, VTS 2018
PublisherIEEE Computer Society
Pages1-6
Number of pages6
ISBN (Electronic)9781538637746
DOIs
StatePublished - May 29 2018
Event36th IEEE VLSI Test Symposium, VTS 2018 - San Francisco, United States
Duration: Apr 22 2018Apr 25 2018

Publication series

NameProceedings of the IEEE VLSI Test Symposium
Volume2018-April

Conference

Conference36th IEEE VLSI Test Symposium, VTS 2018
Country/TerritoryUnited States
CitySan Francisco
Period04/22/1804/25/18

Keywords

  • digital circuit
  • frontend-of-line dielectric breakdown
  • lifetime simulator
  • microprocessor
  • middle-of-line breakdown
  • reliability
  • time-dependent dielectric breakdown
  • wearout

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