Carbon films prepared by plasma deposition using a graphite cathode

The corrosion resistance and oxidation resistance are highly relevant to the industrial use of the carbon films. Therefore, these properties are addressed in this paper, and are correlated with the resistivity, hardness and density of the films. X-ray diffraction showed that all the samples were amorphous. Raman spectra showed a diamond (sp³ carbon) peak at 1330 cm ^-1 and a broad non-diamond carbon (sp² carbon) peak at 1585 cm^-1 for sample 107 (resistivity = 6.4 × 10⁸ Ω.cm, see Table I) and Sample 225 (resistivity = 86.4 Ω.cm, density = 1.82 g/cm³, hardness = 252 Kg/mm², deposited with substrate on support in the same level as the bias electrode without H₂, just Ar, as for Samples 215-217). Samples 107 and 225 differed in that the latter had a smaller diamond peak relative to the non-diamond peak.