Bidirectional Frequency Tuning of Vanadium Dioxide (VO2) Microstring Resonator by Optothermal Excitation

Syed A. Bukhari; Ankur Goswami; Ryan McGee; Rosmi Abraham; Dale Hume; Hyun Joong Chung; Thomas Thundat

doi:10.1109/MEMS46641.2020.9056248

Bidirectional Frequency Tuning of Vanadium Dioxide (VO₂) Microstring Resonator by Optothermal Excitation

Syed A. Bukhari
, Ankur Goswami
, Ryan McGee
, Rosmi Abraham
, Dale Hume
, Hyun Joong Chung
, Thomas Thundat

Department of Chemical and Biological Engineering

University of Alberta
Thermtest Instruments
Indian Institute of Technology Delhi
Texas Instruments

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

5 Scopus citations

Abstract

Tuning mechanical frequency of MEMS and MOEMS devices by integrating the conventional silicon-based devices with functional oxides has become very important recently for mechanical signal processing and ultrasensitive detection. Most of these devices have unidirectional frequency change with external stimuli. Here we show by exploiting the metal insulator transition (MIT) of phase change material (VO₂) bidirectional spatial frequency tuning (in acoustic range) is possible by the application of optothermal excitation. By fabricating VO₂ microstrings (200μm(L)× 5μm(w)× 260(t)\ nm) we demonstrate that bidirectional resonance frequency (f_r) tuning is possible from -2 to +2% depending on the laser power. We further demonstrate that the change in resonance frequency in both the direction (positive or negative) can be also possible along the length of the microstring depending on the laser power.

Original language	English
Title of host publication	33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	961-964
Number of pages	4
ISBN (Electronic)	9781728135809
DOIs	https://doi.org/10.1109/MEMS46641.2020.9056248
State	Published - Jan 2020
Event	33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 - Vancouver, Canada Duration: Jan 18 2020 → Jan 22 2020

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2020-January
ISSN (Print)	1084-6999

Conference

Conference	33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020
Country/Territory	Canada
City	Vancouver
Period	01/18/20 → 01/22/20

Keywords

MEMS
Opto-mechanical
Vanadium dioxide
frequency tuning
microstrings resonators
opto-thermal

Access to Document

10.1109/MEMS46641.2020.9056248

Cite this

Bukhari, S. A., Goswami, A., McGee, R., Abraham, R., Hume, D., Chung, H. J., & Thundat, T. (2020). Bidirectional Frequency Tuning of Vanadium Dioxide (VO₂) Microstring Resonator by Optothermal Excitation. In 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 (pp. 961-964). Article 9056248 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2020-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMS46641.2020.9056248

Bukhari, Syed A. ; Goswami, Ankur ; McGee, Ryan et al. / Bidirectional Frequency Tuning of Vanadium Dioxide (VO₂) Microstring Resonator by Optothermal Excitation. 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020. Institute of Electrical and Electronics Engineers Inc., 2020. pp. 961-964 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{0fc4b678bedc4e40827b439ec4baa00b,

title = "Bidirectional Frequency Tuning of Vanadium Dioxide (VO2) Microstring Resonator by Optothermal Excitation",

abstract = "Tuning mechanical frequency of MEMS and MOEMS devices by integrating the conventional silicon-based devices with functional oxides has become very important recently for mechanical signal processing and ultrasensitive detection. Most of these devices have unidirectional frequency change with external stimuli. Here we show by exploiting the metal insulator transition (MIT) of phase change material (VO2) bidirectional spatial frequency tuning (in acoustic range) is possible by the application of optothermal excitation. By fabricating VO2 microstrings (200μm(L){\texttimes} 5μm(w){\texttimes} 260(t)\textbackslash{} nm) we demonstrate that bidirectional resonance frequency (fr) tuning is possible from -2 to +2\% depending on the laser power. We further demonstrate that the change in resonance frequency in both the direction (positive or negative) can be also possible along the length of the microstring depending on the laser power.",

keywords = "MEMS, Opto-mechanical, Vanadium dioxide, frequency tuning, microstrings resonators, opto-thermal",

author = "Bukhari, \{Syed A.\} and Ankur Goswami and Ryan McGee and Rosmi Abraham and Dale Hume and Chung, \{Hyun Joong\} and Thomas Thundat",

note = "Publisher Copyright: {\textcopyright} 2020 IEEE.; 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020 ; Conference date: 18-01-2020 Through 22-01-2020",

year = "2020",

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language = "English",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

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Bukhari, SA, Goswami, A, McGee, R, Abraham, R, Hume, D, Chung, HJ & Thundat, T 2020, Bidirectional Frequency Tuning of Vanadium Dioxide (VO₂) Microstring Resonator by Optothermal Excitation. in 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020., 9056248, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2020-January, Institute of Electrical and Electronics Engineers Inc., pp. 961-964, 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020, Vancouver, Canada, 01/18/20. https://doi.org/10.1109/MEMS46641.2020.9056248

Bidirectional Frequency Tuning of Vanadium Dioxide (VO₂) Microstring Resonator by Optothermal Excitation. / Bukhari, Syed A.; Goswami, Ankur; McGee, Ryan et al.
33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020. Institute of Electrical and Electronics Engineers Inc., 2020. p. 961-964 9056248 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2020-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Bukhari, Syed A.

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AU - Abraham, Rosmi

AU - Hume, Dale

AU - Chung, Hyun Joong

AU - Thundat, Thomas

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N2 - Tuning mechanical frequency of MEMS and MOEMS devices by integrating the conventional silicon-based devices with functional oxides has become very important recently for mechanical signal processing and ultrasensitive detection. Most of these devices have unidirectional frequency change with external stimuli. Here we show by exploiting the metal insulator transition (MIT) of phase change material (VO2) bidirectional spatial frequency tuning (in acoustic range) is possible by the application of optothermal excitation. By fabricating VO2 microstrings (200μm(L)× 5μm(w)× 260(t)\ nm) we demonstrate that bidirectional resonance frequency (fr) tuning is possible from -2 to +2% depending on the laser power. We further demonstrate that the change in resonance frequency in both the direction (positive or negative) can be also possible along the length of the microstring depending on the laser power.

AB - Tuning mechanical frequency of MEMS and MOEMS devices by integrating the conventional silicon-based devices with functional oxides has become very important recently for mechanical signal processing and ultrasensitive detection. Most of these devices have unidirectional frequency change with external stimuli. Here we show by exploiting the metal insulator transition (MIT) of phase change material (VO2) bidirectional spatial frequency tuning (in acoustic range) is possible by the application of optothermal excitation. By fabricating VO2 microstrings (200μm(L)× 5μm(w)× 260(t)\ nm) we demonstrate that bidirectional resonance frequency (fr) tuning is possible from -2 to +2% depending on the laser power. We further demonstrate that the change in resonance frequency in both the direction (positive or negative) can be also possible along the length of the microstring depending on the laser power.

KW - MEMS

KW - Opto-mechanical

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Bukhari SA, Goswami A, McGee R, Abraham R, Hume D, Chung HJ et al. Bidirectional Frequency Tuning of Vanadium Dioxide (VO₂) Microstring Resonator by Optothermal Excitation. In 33rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2020. Institute of Electrical and Electronics Engineers Inc. 2020. p. 961-964. 9056248. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMS46641.2020.9056248