Biaxially oriented conductive La0.5Sr0.5CoO3 thin films on SiO2/Si

Q. X. Jia; P. N. Arendt; C. Kwon; J. M. Roper; Y. Fan; J. R. Groves; S. R. Foltyn

doi:10.1116/1.581155

Biaxially oriented conductive La_0.5Sr_0.5CoO₃ thin films on SiO₂/Si

Q. X. Jia
, P. N. Arendt
, C. Kwon
, J. M. Roper
, Y. Fan
, J. R. Groves
, S. R. Foltyn

Department of Materials Design and Innovation

Los Alamos National Laboratory Materials Science and Technology Division

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

Abstract

We have grown biaxially textured La_0.5Sr_0.5CoO₃ (LSCO) thin films on technically important SiO₂/Si substrates by pulsed laser deposition, where a biaxially oriented yttria-stabilized zirconia (YSZ) produced by ion-beam-assisted deposition (IBAD) is used as a seed layer to enhance the texture of LSCO on SiO₂/Si. The degree of in-plane texturing of LSCO is directly related to the quality of IBAD-YSZ. The smaller the value of full width at half maximum of the IBAD-YSZ (220) diffraction peak, the higher the crystallinity of the LSCO film. The biaxially oriented LSCO film deposited at 700°C on SiO₂/Si shows metallic resistivity versus temperature characteristics and has a room-temperature resistivity of around 110 μΩ cm.

Original language	English
Pages (from-to)	1380-1383
Number of pages	4
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	16
Issue number	3
DOIs	https://doi.org/10.1116/1.581155
State	Published - 1998

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@article{2caed0a3189a4c71baffcff210a4cda8,

title = "Biaxially oriented conductive La0.5Sr0.5CoO3 thin films on SiO2/Si",

abstract = "We have grown biaxially textured La0.5Sr0.5CoO3 (LSCO) thin films on technically important SiO2/Si substrates by pulsed laser deposition, where a biaxially oriented yttria-stabilized zirconia (YSZ) produced by ion-beam-assisted deposition (IBAD) is used as a seed layer to enhance the texture of LSCO on SiO2/Si. The degree of in-plane texturing of LSCO is directly related to the quality of IBAD-YSZ. The smaller the value of full width at half maximum of the IBAD-YSZ (220) diffraction peak, the higher the crystallinity of the LSCO film. The biaxially oriented LSCO film deposited at 700°C on SiO2/Si shows metallic resistivity versus temperature characteristics and has a room-temperature resistivity of around 110 μΩ cm.",

author = "Jia, \{Q. X.\} and Arendt, \{P. N.\} and C. Kwon and Roper, \{J. M.\} and Y. Fan and Groves, \{J. R.\} and Foltyn, \{S. R.\}",

year = "1998",

doi = "10.1116/1.581155",

language = "English",

volume = "16",

pages = "1380--1383",

journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",

issn = "0734-2101",

publisher = "AVS Science and Technology Society",

number = "3",

}

TY - JOUR

T1 - Biaxially oriented conductive La0.5Sr0.5CoO3 thin films on SiO2/Si

AU - Jia, Q. X.

AU - Arendt, P. N.

AU - Kwon, C.

AU - Roper, J. M.

AU - Fan, Y.

AU - Groves, J. R.

AU - Foltyn, S. R.

PY - 1998

Y1 - 1998

N2 - We have grown biaxially textured La0.5Sr0.5CoO3 (LSCO) thin films on technically important SiO2/Si substrates by pulsed laser deposition, where a biaxially oriented yttria-stabilized zirconia (YSZ) produced by ion-beam-assisted deposition (IBAD) is used as a seed layer to enhance the texture of LSCO on SiO2/Si. The degree of in-plane texturing of LSCO is directly related to the quality of IBAD-YSZ. The smaller the value of full width at half maximum of the IBAD-YSZ (220) diffraction peak, the higher the crystallinity of the LSCO film. The biaxially oriented LSCO film deposited at 700°C on SiO2/Si shows metallic resistivity versus temperature characteristics and has a room-temperature resistivity of around 110 μΩ cm.

AB - We have grown biaxially textured La0.5Sr0.5CoO3 (LSCO) thin films on technically important SiO2/Si substrates by pulsed laser deposition, where a biaxially oriented yttria-stabilized zirconia (YSZ) produced by ion-beam-assisted deposition (IBAD) is used as a seed layer to enhance the texture of LSCO on SiO2/Si. The degree of in-plane texturing of LSCO is directly related to the quality of IBAD-YSZ. The smaller the value of full width at half maximum of the IBAD-YSZ (220) diffraction peak, the higher the crystallinity of the LSCO film. The biaxially oriented LSCO film deposited at 700°C on SiO2/Si shows metallic resistivity versus temperature characteristics and has a room-temperature resistivity of around 110 μΩ cm.

UR - https://www.scopus.com/pages/publications/0038592805

U2 - 10.1116/1.581155

DO - 10.1116/1.581155

M3 - Article

AN - SCOPUS:0038592805

SN - 0734-2101

VL - 16

SP - 1380

EP - 1383

JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

IS - 3

ER -

Biaxially oriented conductive La_0.5Sr_0.5CoO₃ thin films on SiO₂/Si

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