Atomic scale investigation of chemical heterogeneity in β-(AlxGa1-x)2O3 films using atom probe tomography

Baishakhi Mazumder; Jith Sarker; Yuewei Zhang; Jared M. Johnson; Menglin Zhu; Siddharth Rajan; Jinwoo Hwang

doi:10.1063/1.5113627

Atomic scale investigation of chemical heterogeneity in β-(Al_xGa_1-x)₂O₃ films using atom probe tomography

Baishakhi Mazumder
, Jith Sarker
, Yuewei Zhang
, Jared M. Johnson
, Menglin Zhu
, Siddharth Rajan
, Jinwoo Hwang

Department of Materials Design and Innovation

SUNY Buffalo
Ohio State University

Research output: Contribution to journal › Article › peer-review

16 Scopus citations

Abstract

We investigated atomic scale chemical heterogeneity in β-(Al_xGa_1-x)₂O₃ thin films with different aluminum (Al) concentrations using atom probe tomography. Two film samples with an Al molar concentration of x = 0.2 and x = 0.5, grown by plasma assisted molecular beam epitaxy, were analyzed and compared. The measured overall compositions were found to be in agreement with the target compositions in both cases. The film with the higher Al content showed a significant chemical heterogeneity, which could be attributed to the low growth temperature.

Original language	English
Article number	132105
Journal	Applied Physics Letters
Volume	115
Issue number	13
DOIs	https://doi.org/10.1063/1.5113627
State	Published - Sep 23 2019

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title = "Atomic scale investigation of chemical heterogeneity in β-(AlxGa1-x)2O3 films using atom probe tomography",

abstract = "We investigated atomic scale chemical heterogeneity in β-(AlxGa1-x)2O3 thin films with different aluminum (Al) concentrations using atom probe tomography. Two film samples with an Al molar concentration of x = 0.2 and x = 0.5, grown by plasma assisted molecular beam epitaxy, were analyzed and compared. The measured overall compositions were found to be in agreement with the target compositions in both cases. The film with the higher Al content showed a significant chemical heterogeneity, which could be attributed to the low growth temperature.",

author = "Baishakhi Mazumder and Jith Sarker and Yuewei Zhang and Johnson, \{Jared M.\} and Menglin Zhu and Siddharth Rajan and Jinwoo Hwang",

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AU - Mazumder, Baishakhi

AU - Sarker, Jith

AU - Zhang, Yuewei

AU - Johnson, Jared M.

AU - Zhu, Menglin

AU - Rajan, Siddharth

AU - Hwang, Jinwoo

PY - 2019/9/23

Y1 - 2019/9/23

N2 - We investigated atomic scale chemical heterogeneity in β-(AlxGa1-x)2O3 thin films with different aluminum (Al) concentrations using atom probe tomography. Two film samples with an Al molar concentration of x = 0.2 and x = 0.5, grown by plasma assisted molecular beam epitaxy, were analyzed and compared. The measured overall compositions were found to be in agreement with the target compositions in both cases. The film with the higher Al content showed a significant chemical heterogeneity, which could be attributed to the low growth temperature.

AB - We investigated atomic scale chemical heterogeneity in β-(AlxGa1-x)2O3 thin films with different aluminum (Al) concentrations using atom probe tomography. Two film samples with an Al molar concentration of x = 0.2 and x = 0.5, grown by plasma assisted molecular beam epitaxy, were analyzed and compared. The measured overall compositions were found to be in agreement with the target compositions in both cases. The film with the higher Al content showed a significant chemical heterogeneity, which could be attributed to the low growth temperature.

UR - https://www.scopus.com/pages/publications/85072723217

U2 - 10.1063/1.5113627

DO - 10.1063/1.5113627

M3 - Article

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SN - 0003-6951

VL - 115

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 13

M1 - 132105

ER -

Atomic scale investigation of chemical heterogeneity in β-(Al_xGa_1-x)₂O₃ films using atom probe tomography

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