Abstract
The properties of thin film amorphous and poly-Si are characterized focusing on the heterostructure type solar cell. Removal of the Mo substrate enabled the analysis of bare thin film Si as well as vertical and lateral structural properties. Through thermally stimulated current (TSC) measurement, the poly-Si grain boundary trap type and activation energy are determined. Lastly, by using RF plasma, hydrogen grain boundary passivation is achieved.
| Original language | English |
|---|---|
| Pages (from-to) | 1571-1574 |
| Number of pages | 4 |
| Journal | Conference Record of the IEEE Photovoltaic Specialists Conference |
| Volume | 2 |
| State | Published - 1994 |
| Event | Proceedings of the 24th IEEE Photovoltaic Specialists Conference. Part 2 (of 2) - Waikoloa, HI, USA Duration: Dec 5 1994 → Dec 9 1994 |
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