Analysis of grating light valves with partial surface electrodes

E. P. Furlani; E. H. Lee; H. Luo

doi:10.1063/1.366752

Analysis of grating light valves with partial surface electrodes

E. P. Furlani
, E. H. Lee
, H. Luo

Physics

Eastman Kodak
SUNY Buffalo

Research output: Contribution to journal › Article › peer-review

12 Scopus citations

Abstract

The grating light valve (GLV) is a micro-electromechanical reflection phase grating that operates on the electrostatic deflection of microbeams. In a conventional GLV, each beam is coated with a surface electrode that spans its length. In this paper, a GLV with partial electrode coverage is studied. An analysis is presented of the deflection profile and switching voltage for a series of electrode lengths. These results are compared with the performance of a conventional GLV.

Original language	English
Pages (from-to)	629-634
Number of pages	6
Journal	Journal of Applied Physics
Volume	83
Issue number	2
DOIs	https://doi.org/10.1063/1.366752
State	Published - Jan 15 1998

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10.1063/1.366752

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title = "Analysis of grating light valves with partial surface electrodes",

abstract = "The grating light valve (GLV) is a micro-electromechanical reflection phase grating that operates on the electrostatic deflection of microbeams. In a conventional GLV, each beam is coated with a surface electrode that spans its length. In this paper, a GLV with partial electrode coverage is studied. An analysis is presented of the deflection profile and switching voltage for a series of electrode lengths. These results are compared with the performance of a conventional GLV.",

author = "Furlani, \{E. P.\} and Lee, \{E. H.\} and H. Luo",

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AU - Furlani, E. P.

AU - Lee, E. H.

AU - Luo, H.

PY - 1998/1/15

Y1 - 1998/1/15

N2 - The grating light valve (GLV) is a micro-electromechanical reflection phase grating that operates on the electrostatic deflection of microbeams. In a conventional GLV, each beam is coated with a surface electrode that spans its length. In this paper, a GLV with partial electrode coverage is studied. An analysis is presented of the deflection profile and switching voltage for a series of electrode lengths. These results are compared with the performance of a conventional GLV.

AB - The grating light valve (GLV) is a micro-electromechanical reflection phase grating that operates on the electrostatic deflection of microbeams. In a conventional GLV, each beam is coated with a surface electrode that spans its length. In this paper, a GLV with partial electrode coverage is studied. An analysis is presented of the deflection profile and switching voltage for a series of electrode lengths. These results are compared with the performance of a conventional GLV.

UR - https://www.scopus.com/pages/publications/0013440367

U2 - 10.1063/1.366752

DO - 10.1063/1.366752

M3 - Article

AN - SCOPUS:0013440367

SN - 0021-8979

VL - 83

SP - 629

EP - 634

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 2

ER -

Analysis of grating light valves with partial surface electrodes

Abstract

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