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A three-dimensional computer model for simulation of light-trapping effects in porous silicon

  • Florida State University

Research output: Contribution to journalConference articlepeer-review

3 Scopus citations

Abstract

It has been demonstrated experimentally that porous silicon can be used to enhance the sensitivity, spectral bandwidth, and light acceptance angle of photodiodes. A three-dimensional model was used to approximate the surface geometry of porous silicon. It was found that the main contributing factor to the observed high efficiencies is the shape of the pores in the micron range. Comparison between the computer simulation and actual experimental results shows that the simulation gives a good approximation of the behavior of porous silicon. The study also provides the insight that the surface geometry of porous silicon is the main contributing factor to its efficiency in trapping light.

Original languageEnglish
Pages (from-to)224-232
Number of pages9
JournalMicroelectronic Engineering
Volume66
Issue number1-4
DOIs
StatePublished - Apr 2003
EventIUMRS-ICEM 2002 - Xi an, China
Duration: Jun 10 2002Jun 14 2002

Keywords

  • Light-trap
  • Micro-structure
  • Porosity
  • Porous silicon

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