A novel photoplastic piezoelectric nanocomposite for MEMS applications

K. Prashanthi; M. Naresh; V. Seena; T. Thundat; V. Ramgopal Rao

doi:10.1109/JMEMS.2011.2178118

A novel photoplastic piezoelectric nanocomposite for MEMS applications

K. Prashanthi
, M. Naresh
, V. Seena
, T. Thundat
, V. Ramgopal Rao

Department of Chemical and Biological Engineering

University of Alberta
Indian Institute of Technology Bombay

Research output: Contribution to journal › Article › peer-review

48 Scopus citations

Abstract

This letter reports a photoplastic (SU-8) piezoelectric (ZnO) nanocomposite route for realization of simple and low-cost piezoelectric microelectromechanical systems (MEMS). Integrating the ZnO nanoparticles into a photosensitive SU-8 polymer matrix not only retains the highly desired piezoelectric properties of ZnO but also combines the photopatternability and the optical transparency of the SU-8 polymer. These two aspects, therefore, lead to exciting MEMS applications with simple photolithography-based microfabrication. This approach opens up many new applications in the field of both sensor and energy harvesting.

Original language	English
Article number	6118300
Pages (from-to)	259-261
Number of pages	3
Journal	Journal of Microelectromechanical Systems
Volume	21
Issue number	2
DOIs	https://doi.org/10.1109/JMEMS.2011.2178118
State	Published - Apr 2012

Keywords

Microelectromechanical systems (MEMS)
nanocomposites
piezoelectric
SU-8 polymer
ZnO

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10.1109/JMEMS.2011.2178118

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title = "A novel photoplastic piezoelectric nanocomposite for MEMS applications",

abstract = "This letter reports a photoplastic (SU-8) piezoelectric (ZnO) nanocomposite route for realization of simple and low-cost piezoelectric microelectromechanical systems (MEMS). Integrating the ZnO nanoparticles into a photosensitive SU-8 polymer matrix not only retains the highly desired piezoelectric properties of ZnO but also combines the photopatternability and the optical transparency of the SU-8 polymer. These two aspects, therefore, lead to exciting MEMS applications with simple photolithography-based microfabrication. This approach opens up many new applications in the field of both sensor and energy harvesting.",

keywords = "Microelectromechanical systems (MEMS), nanocomposites, piezoelectric, SU-8 polymer, ZnO",

author = "K. Prashanthi and M. Naresh and V. Seena and T. Thundat and \{Ramgopal Rao\}, V.",

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AU - Prashanthi, K.

AU - Naresh, M.

AU - Seena, V.

AU - Thundat, T.

AU - Ramgopal Rao, V.

PY - 2012/4

Y1 - 2012/4

N2 - This letter reports a photoplastic (SU-8) piezoelectric (ZnO) nanocomposite route for realization of simple and low-cost piezoelectric microelectromechanical systems (MEMS). Integrating the ZnO nanoparticles into a photosensitive SU-8 polymer matrix not only retains the highly desired piezoelectric properties of ZnO but also combines the photopatternability and the optical transparency of the SU-8 polymer. These two aspects, therefore, lead to exciting MEMS applications with simple photolithography-based microfabrication. This approach opens up many new applications in the field of both sensor and energy harvesting.

AB - This letter reports a photoplastic (SU-8) piezoelectric (ZnO) nanocomposite route for realization of simple and low-cost piezoelectric microelectromechanical systems (MEMS). Integrating the ZnO nanoparticles into a photosensitive SU-8 polymer matrix not only retains the highly desired piezoelectric properties of ZnO but also combines the photopatternability and the optical transparency of the SU-8 polymer. These two aspects, therefore, lead to exciting MEMS applications with simple photolithography-based microfabrication. This approach opens up many new applications in the field of both sensor and energy harvesting.

KW - Microelectromechanical systems (MEMS)

KW - nanocomposites

KW - piezoelectric

KW - SU-8 polymer

KW - ZnO

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ER -

A novel photoplastic piezoelectric nanocomposite for MEMS applications

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Keywords

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