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A differential p-ISFET based on-chip pH sensor with substrate based drift reset capability

  • SUNY Buffalo

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

3 Scopus citations

Abstract

This paper presents a monolithic, inexpensive, label free, robust pH sensor that can be fabricated in an unmodified CMOS process. The sensor uses a differential p-ISFET architecture which substantially reduces non-ideal common mode effects which corrupt readout in ISFET based pH sensors and occupy only a small footprint. Additionally, the design offers the capability to correct for drift through control of the n-well voltage, which has not been demonstrated previously. We present results obtained from testing the sensor that is fabricated in the AMS 0.35m process, including a demonstration of the drift correction. We demonstrate a differential sensitivity of 15 mV/pH over the entire pH range, with the ability to remove the already small drift of 0.1 mV/min using the bulk-source voltage adjustment.

Original languageEnglish
Title of host publication2021 IEEE Sensors, SENSORS 2021 - Conference Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781728195018
DOIs
StatePublished - 2021
Event20th IEEE Sensors, SENSORS 2021 - Virtual, Online, Australia
Duration: Oct 31 2021Nov 4 2021

Publication series

NameProceedings of IEEE Sensors
Volume2021-October
ISSN (Print)1930-0395
ISSN (Electronic)2168-9229

Conference

Conference20th IEEE Sensors, SENSORS 2021
Country/TerritoryAustralia
CityVirtual, Online
Period10/31/2111/4/21

Keywords

  • CMOS sensor
  • ISFET
  • biosensor
  • chemical sensor
  • differential p-ISFET
  • drift cancellation
  • lab-on-chip
  • noise cancellation
  • pH sensor

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