2D Silicon/Ferroelectric Liquid Crystal Spatial Light Modulators

Timothy J. Drabik; Albert H. Titus; Mark A. Handschy; David Banas; Stephen D. Gaalema; David J. Ward

doi:10.1109/40.400643

2D Silicon/Ferroelectric Liquid Crystal Spatial Light Modulators

Timothy J. Drabik
, Albert H. Titus
, Mark A. Handschy
, David Banas
, Stephen D. Gaalema
, David J. Ward

Department of Biomedical Engineering

Georgia Institute of Technology
Displaytech, Inc.
Black Forest Engineering

Research output: Contribution to journal › Article › peer-review

18 Scopus citations

Abstract

We have developed a spatial light modulator technology based on foundry silicon fabrication processes. This technology employs a thin, ferroelectric liquid crystal light-modulating layer at the substrate's surface, producing electrically addressed display devices with resolutions up to 256x256 and frame rates up to 10 kHz. We have also fabricated optically addressed smart-pixel arrays for low-level image processing. Performance has advanced rapidly due to design innovations and effective use of modern process features.

Original language	English
Pages (from-to)	67-76
Number of pages	10
Journal	IEEE Micro
Volume	15
Issue number	4
DOIs	https://doi.org/10.1109/40.400643
State	Published - Aug 1995

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title = "2D Silicon/Ferroelectric Liquid Crystal Spatial Light Modulators",

abstract = "We have developed a spatial light modulator technology based on foundry silicon fabrication processes. This technology employs a thin, ferroelectric liquid crystal light-modulating layer at the substrate's surface, producing electrically addressed display devices with resolutions up to 256x256 and frame rates up to 10 kHz. We have also fabricated optically addressed smart-pixel arrays for low-level image processing. Performance has advanced rapidly due to design innovations and effective use of modern process features.",

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year = "1995",

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AU - Drabik, Timothy J.

AU - Titus, Albert H.

AU - Handschy, Mark A.

AU - Banas, David

AU - Gaalema, Stephen D.

AU - Ward, David J.

PY - 1995/8

Y1 - 1995/8

N2 - We have developed a spatial light modulator technology based on foundry silicon fabrication processes. This technology employs a thin, ferroelectric liquid crystal light-modulating layer at the substrate's surface, producing electrically addressed display devices with resolutions up to 256x256 and frame rates up to 10 kHz. We have also fabricated optically addressed smart-pixel arrays for low-level image processing. Performance has advanced rapidly due to design innovations and effective use of modern process features.

AB - We have developed a spatial light modulator technology based on foundry silicon fabrication processes. This technology employs a thin, ferroelectric liquid crystal light-modulating layer at the substrate's surface, producing electrically addressed display devices with resolutions up to 256x256 and frame rates up to 10 kHz. We have also fabricated optically addressed smart-pixel arrays for low-level image processing. Performance has advanced rapidly due to design innovations and effective use of modern process features.

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DO - 10.1109/40.400643

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VL - 15

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EP - 76

JO - IEEE Micro

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2D Silicon/Ferroelectric Liquid Crystal Spatial Light Modulators

Abstract

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