Abstract
Monocrystalline silicon nanomembranes are preselectively doped to transform high mobility into high device speed. They are then released and directly flip transferred to a low-temperature plastic substrate. Local alignment enables the fabrication of very small device features using these nanomembranes on soft substrates. The device miniaturization leads to record-speed flexible thin-film transistors.
| Original language | English |
|---|---|
| Pages (from-to) | 2553-2557 |
| Number of pages | 5 |
| Journal | Small |
| Volume | 6 |
| Issue number | 22 |
| DOIs | |
| State | Published - Nov 22 2010 |
Keywords
- Alignment
- flexible electronics
- nanomembrane
- radio frequency (RF)
- thin-film transistors (TFT)
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