Project Details
| Status | Finished |
|---|---|
| Effective start/end date | 04/1/01 → 09/30/02 |
Funding
- Advanced Silicon Materials: $83,957.00
On-Line Measurement of Particles Generated in Polysilicon CVD Reactors
- Swihart, Mark (PI)
Project: Research
Project: Research
| Status | Finished |
|---|---|
| Effective start/end date | 04/1/01 → 09/30/02 |